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Molybdenum Oxide (MoOx) Sputtering Targets

Accelerate the performance of your OLEDs and solar cells with our high-purity Molybdenum Oxide () sputtering targets. Recognized for its high work function and versatile electronic properties, is an essential material for Hole Injection Layers (HILs) in organic light-emitting diodes and transparent electrodes. We supply ceramic targets with precisely controlled stoichiometry (such as or composition) and high density, ensuring excellent thermal stability and the uniform film deposition critical for high-efficiency photovoltaics and advanced flat panel displays.

Experience Unmatched Quality and Performance

Key Features of Our Molybdenum Oxide (MoOx) Sputtering Targets

OLED Performance (MoO3 HIL)

First, molybdenum trioxide (MoO3) is the premier material for MoO3 hole injection layers. It works by increasing the work function of the anode, which significantly enhances hole injection and transport, consequently boosting the luminous and power efficiency of advanced OLED displays.

(Referenced: Flexible OLED Performance Enhancement: The Impact of Ag NWs: Ag NPs Electrode-Integrated MoOX QDs Hole-Injection Layer)

Photovoltaic & Energy Storage

Furthermore, MoOx serves as a critical molybdenum oxide solar cell buffer. For example, in Perovskite and silicon heterojunction solar cells, it acts as a transparent, high work function layer to efficiently collect holes and prevent sputtering damage to underlying layers.

(Referenced: Optimization of MoOΧ Buffer Layer for Single-Junction and Four-Terminal Perovskite-Silicon Tandem Solar Cells)

Anti-Reflection & Adhesion

Finally, molybdenum oxide films are widely used in MoxOy$ electrochromic film applications. This capability allows them to reversibly change color and transparency when a small voltage is applied, making them ideal for smart windows, variable transmittance mirrors, and energy-saving displays.

(Referenced: Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates)

Technical Information

 

Standard Compositions Purity Hardness Density Melting Point Available Geometries Backing Plate Options

Mo4O11

MoO3

MoO2

MoO2<x<3

 

 

99.5% ~3-5

Observed:

4.29 g/cm³

÷

Theoretical:

4.69 g/cm³

__________

91.47%

850 °C Planar

Planar:

  • Copper (Cu)
  • Molybdenum (Mo)

Manufacturing Excellence for Controlled MoOx Stoichiometry

For stable, high-quality reactive sputtering, rely on our custom Molybdenum Oxide targets. Our controlled manufacturing process ensures the target’s thermal shock resistance and low particle generation, crucial for maximizing yields in display and energy applications. We offer various oxide compositions and geometries to meet your specific film stoichiometry requirements.

  • Stoichiometry Control: We offer various oxide compositions, including MoO2 (semiconducting), Mo4O11, and MoO3 (insulating). This flexibility supports precise control over film properties, often achieved through reactive sputtering of molybdenum oxide targets.

 

  •  High Density & Thermal Stability: Our ceramic targets are sintered to a high density (up to 91.47% of theoretical density). This high density is crucial for minimizing particle generation and ensuring high thermal shock resistance during energetic PVD processes.

Custom Planar and Rotatable Targets

We offer fully customized solutions. Our expertise allows us to manufacture Custom Planar and Rotatable Targets in various sizes and assemblies. This includes Large Area Deposition Targets designed to optimize material usage and system throughput for both R&D and mass production.

Precious Metal Repress & Reclaim Services

Your investment in Platinum Group Metal Targets is protected by our material services. Our Precious Metal Sputtering program includes comprehensive reclaim and reprocessing to help you recover high-value Sputtering Target Material, minimizing waste and reducing your total cost of ownership.

Get Started with High-Purity Molybdenum Oxide

Contact us to learn more about how our high-quality MoOx Sputtering Targets can support your specific microelectronics application needs. Request a quote today!

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