High-Purity Ruthenium Sputtering Targets for Advanced Thin Film Technology
SCI Engineered Materials is a premier supplier of Ruthenium Sputtering Targets, providing the ultra-high-purity materials essential for next-generation thin-film technology. Our High-Purity Ru PVD Targets (up to 99.99% purity) are engineered for maximum density and stability, ensuring consistent, defect-free material transfer in your sputtering process. We maintain tight control over impurity levels to provide superior performance in your most demanding applications.
Experience Unmatched Quality and Performance
Ruthenium in Microelectronics and High-Value Applications
The properties of Ruthenium make it critical for scaling down components. Its high melting point, excellent electrical conductivity, and superior oxidation resistance make it ideal for:
Ruthenium in Microelectronics
This element is essential for developing next-generation components, including advanced memory and integrated circuits.
Advanced Interconnect Materials
Ruthenium is a key Advanced Interconnect Material, serving as a robust diffusion barrier and seed layer to prevent copper migration and ensure signal integrity.
Broader Applications
We supply targets for data storage, display technology, and other sectors requiring high-stability Ruthenium Thin Film Deposition.
Three Meter Rotatable Ruthenium Sputtering Target
Scanning Electron Microscope (SEC) Scan of Ruthenium Sputtering Target
Five-Millimeter Round Planar Ruthenium Sputtering Target
Platinum Group Metal Targets and Custom Manufacturing
Our manufacturing excellence focuses on producing targets that guarantee consistent film thickness and composition, regardless of your system requirements. We ensure that our targets meet the highest industry standards, backed by our ISO 9001:2015 certification. Consequently, customers rely on our capability to produce custom planar and rotary Ruthenium Sputtering Targets that optimize performance in every PVD system. As a specialized supplier of Platinum Group Metal Targets, we understand the need for quality control and material conservation.
Custom Planar and Rotatable Targets
We offer fully customized solutions. Our expertise allows us to manufacture Custom Planar and Rotatable Targets in various sizes and assemblies. This includes Large Area Deposition Targets designed to optimize material usage and system throughput for both R&D and mass production.
Precious Metal Repress & Reclaim Services
Your investment in Platinum Group Metal Targets is protected by our material services. Our Precious Metal Sputtering program includes comprehensive reclaim and reprocessing to help you recover high-value Sputtering Target Material, minimizing waste and reducing your total cost of ownership.
Get Started with High-Purity Ruthenium
Contact us to learn more about how our high-quality Ruthenium Sputtering Targets can support your specific microelectronics application needs. Request a quote today!

