Barium Titanate (BaTiO3) Sputtering Targets
Power the next generation of compact electronics with our high-purity barium titanate sputtering targets. As the most widely used ferroelectric perovskite, Barium Titanate (BaTiO3) is the definitive BaTiO3 ferroelectric deposition material for high-capacitance applications. Consequently, it is essential for manufacturing Multilayer Ceramic Capacitors (MLCCs), thermistors, and electro-optic devices. We supply high-density ceramic targets (99.95% purity) designed to deliver the exceptional dielectric constant and low dielectric loss required for high-performance thin films.
Experience Unmatched Quality and Performance
Critical Applications: Capacitors, Sensors, and Memory
Our BaTiO3 targets are engineered to support the miniaturization and functionality of modern devices:
Multilayer Ceramic Capacitors (MLCCs)
First, Barium Titanate is the industry standard for BaTiO3 thin film capacitor dielectrics. Research confirms that sputtered ferroelectric films can achieve the high permittivity and low dielectric loss necessary for next-generation, high-density capacitors.
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Piezoelectric Sensors & Actuators
Furthermore, as a robust lead-free piezoelectric material, BaTiO3 is an environmentally friendly alternative to PZT. Therefore, it is increasingly used in biocompatible sensors, micro-actuators, and energy harvesting devices.
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Electro-Optic & Memory Devices
Finally, due to its strong electro-optic coefficients, BaTiO3 is used in optical modulators. Additionally, its reversible polarization makes it a key candidate for non-volatile ferroelectric random-access memory (FeRAM).
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Technical Information
| Standard Composition | Purity | Hardness | Density | Bandgap | Available Geometries | Backing Plate Options |
| BaTiO3 | 99.90% | 5 |
Observed: 5.85 g/cm³ ÷ Theoretical: 6.02 g/cm³ __________
97.17% |
3.2eV |
Planar |
|
Manufacturing High-Density Perovskite Targets
Sputtering complex oxides requires targets with exceptional structural integrity.
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High-Density Ceramics: We sinter our ferroelectric thin film targets to high densities to prevent nodule formation and arcing during RF sputtering. This is vital for maintaining the stoichiometry of the complex oxide film.
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Bonding for Fragile Ceramics: Barium Titanate is brittle. To prevent cracking under thermal stress, we strongly recommend our Indium Bonding service, which provides a compliant layer between the ceramic target and the cooling plate.
Prevent Cracking with Indium Bonding
Barium Titanate is a brittle ceramic that is sensitive to thermal shock. Protect your investment with our professional Indium Bonding service, which ensures superior thermal transfer and stress relief between the target and backing plate
Expand Your Research with Strontium Titanate
Frequently used alongside Barium Titanate in tunable microwave devices and superconducting substrates, Strontium Titanate (SrTiO3) is another essential high-k perovskite. Explore our high-purity options to complete your material stack
Sourcing Raw Materials for Synthesis?
Do you require high-purity precursors for your own ceramic synthesis or thick-film screen printing? We supply advanced ceramic powders with the same rigorous quality standards as our sputtering targets.
Get Started with High-Density Barium Titanate
Contact us to learn more about how our high-quality BaTiO3 Sputtering Targets can support your specific microelectronics application needs. Request a quote today!