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Titanium Oxide (TiOx)

Basic Information

Purity: 99.99% (4N)

Color: Dark Blue/Grey

Density 97%+


PlanarRotatable

Round

Up To: 12″ Diameter

Multi-Tile

Up to: 11″ (Segments) x 6.75″ OD

Monolithic

Square

Up to: 12″ x 6.5″ x 0.75″ Thick

 
Mu, Chi, Upsilon, DeltaOEM Configurations

TiOx is different than TiO2. By creating a vacancy where an oxygen molecule would be, the material becomes conductive. Undoped TiO2 is only able to be sputtered via RF sputtering, but DC sputtering requires a conductive target source. Our conductive TiOx can be sputtered as a few different thin films depending on the gas environment of the vacuum chamber. This metal oxide is used as a dielectric coating, while TiO2 is used as pigments, especially in applications that require the blocking of ultra-violet light.

Technical Information

Melting Point

1,843 °C  (3,349 °F; 2,116 K)

Boiling Point

2,972 °C (5,382 °F; 3,245 K)

Refractive Index:

(anatase)

(brookite)

(brookite)

2.488

2.583

2.609

Molar Mass

79.866 g/mol

Average Grain Size

2 – 5 mµ

Applications

Pigment (White)

UV Blocking Pigments (Sunscreen)

Dielectric Mirrors

Photocatalyst

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