Home » TiOx Data Sheet
Titanium Oxide (TiOx)
Basic Information
Purity: 99.99% (4N)
Color: Dark Blue/Grey
Density 97%+
Planar | Rotatable |
Round Up To: 12″ Diameter | Multi-Tile Up to: 11″ (Segments) x 6.75″ OD Monolithic |
Square Up to: 12″ x 6.5″ x 0.75″ Thick | |
Mu, Chi, Upsilon, Delta | OEM Configurations |
TiOx is different than TiO2. By creating a vacancy where an oxygen molecule would be, the material becomes conductive. Undoped TiO2 is only able to be sputtered via RF sputtering, but DC sputtering requires a conductive target source. Our conductive TiOx can be sputtered as a few different thin films depending on the gas environment of the vacuum chamber. This metal oxide is used as a dielectric coating, while TiO2 is used as pigments, especially in applications that require the blocking of ultra-violet light.
Technical Information
Melting Point | 1,843 °C (3,349 °F; 2,116 K) |
Boiling Point | 2,972 °C (5,382 °F; 3,245 K) |
Refractive Index: (anatase) (brookite) (brookite) | 2.488 2.583 2.609 |
Molar Mass | 79.866 g/mol |
Average Grain Size | 2 – 5 mµ |
Applications
Pigment (White)
UV Blocking Pigments (Sunscreen)
Dielectric Mirrors
Photocatalyst