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Ruthenium (Ru) Sputtering Targets

Ruthenium (Ru)

Ruthenium (Ru) atomic number 44, and appears as a silvery-white metallic and is part of the Platinum Group Metals (PGMs). Of the elements in group 8, it is the only element that has one electron on its outer shell, as opposed to two. Ruthenium is usually produced as a byproduct of platinum refinement, it is largely located in the Ural Mountains, and throughout North & South America. Ruthenium is able to harden palladium and platinum alloys, and so thin films are applied to electrical contacts to increase the durability of the precious metal contacts. Thin-film applications for this material include electrodes in dynamic random-access memory (DRAMs) & ferroelectric random-access memory (FRAMs). Ruthenium thin films also serve as metal gates in p-doped metal-oxide-semiconductor field-effect transistors (p-MOSFETs), and even in the fabrication of microelectronics, specifically via the Dual-Damascene Fabrication Process since copper can be electroplated onto to the Ruthenium.

Ruthenium (Ru) Sputtering Targets

We offer our Ruthenium (Ru) Sputtering Targets in 99.95% purity. You can add requests for our most common circular targets below which range in diameters from 1″ to 8″ round, and from 0.125″ Thick & 0.25″ Thick.  If you’d like a quote on a custom Ruthenium (Ru) Sputtering Target please visit our custom request form to get exactly what you need!

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SCI Engineered Materials
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