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Silicon Nitride (Si3N4) Sputtering Targets

Silicon Nitride (Si3N4)

This thermodynamically stable ceramic compound of silicon and nitrogen appears as a grey solid when pressed and sintered. Silicon Nitride is used as an etch mask in microfabrication, and as an insulator & chemical barrier in integrated circuits. Other uses include bearings in many different applications, as well as high-temperature materials like rocket engines.

Silicon Nitride (Si3N4) Sputtering Targets

We offer our Silicon Nitride Sputtering Targets in 99.5% & 99.9% purity. You can add requests for our most common circular targets below which range in diameters from 1″ to 8″ round, and from 0.125″ Thick & 0.25″ Thick.  If you’d like a quote on a custom Silicon Nitride Sputtering Target please visit our custom request form to get exactly what you need!

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Address & Contact

SCI Engineered Materials
2839 Charter Street
Columbus, Ohio, 43228

Phone: (614) 486-0261
Fax: (614) 486-0912