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Tomorrow’s tech solutions…today!

Tomorrow’s tech solutions…Today!


Silicon Nitride (Si3N4) Sputtering Targets

Silicon Nitride (Si3N4)

This thermodynamically stable ceramic compound of silicon and nitrogen appears as a grey solid when pressed and sintered. Silicon Nitride is used as an etch mask in microfabrication, and as an insulator & chemical barrier in integrated circuits. Other uses include bearings in many different applications, as well as high-temperature materials like rocket engines.

Silicon Nitride (Si3N4) Sputtering Targets

We offer our Silicon Nitride Sputtering Targets in 99.5% & 99.9% purity. You can add requests for our most common circular targets below which range in diameters from 1″ to 8″ round, and from 0.125″ Thick & 0.25″ Thick.  If you’d like a quote on a custom Silicon Nitride Sputtering Target please visit our custom request form to get exactly what you need!

Add items to your quote request below.

No ordering or transactions will occur until an official order has been placed.

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Address & Contact

SCI Engineered Materials
2839 Charter Street
Columbus, Ohio, 43228

Phone: (614) 486-0261
Fax: (614) 486-0912